Wan Shou, an assistant professor of mechanical engineering at the University of Arkansas, has been awarded a more than $246,000 grant to study semiconductor fabrication.

Shou's award is spread over two years and funded by the National Science Foundation through its Early-Concept Grants for Exploratory Research (EAGER) program. The EAGER grants support exploratory work in early stages on untested, but potentially transformative, research ideas or approaches.

Shou's project will develop a transformative additive manufacturing (also known as 3D printing) approach for high-quality semiconductor fabrication. Specifically, Shou will conduct fundamental research to understand the melting and consequently, the phase change and solidification of silicon. If successful, additive manufacturing will offer a promising alternative to directly fabricating and patterning single-crystal silicon structures for devices with greater speed and efficiency.

"By integrating simulation and experimental insights, this project expects to establish a foundational framework for additive nanomanufacturing of silicon, which will enable us to develop unique 3D printing technology for semiconductor manufacturing," Shou said. "Upon completion, the resulting knowledge and technology could revolutionize the semiconductor industry and significantly enhance U.S. economic competitiveness."

"We are very proud of Dr. Shou's accomplishment in receiving a prestigious NSF grant," said Steve Tung, department head of mechanical engineering. "His research in novel semiconductor processing will greatly advance chip manufacturing and elevate the visibility of the U of A in this field. This project will also advance the workforce development for next generation semiconductor engineers and innovators." 

Shou joined the faculty of the Mechanical Engineering Department in 2021. He holds a doctorate in mechanical engineering from Missouri University of Science and Technology. Shou is also a member of the UA Power Group.